Thermally cured underlayer for lithographic application

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...

Reexamination Certificate

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Details

C525S374000, C525S375000, C526S281000

Reexamination Certificate

active

06924339

ABSTRACT:
Thermally cured undercoat for use in lithography of a thermally cured composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein the hydroxyl containing polymer is a polymer comprising units m, n and o of the following formula:wherein R1is H or methyl; R2is a substituted or unsubstituted C6-C14aryl acrylate or C6-C14aryl methacrylate group wherein the substituted groups may be phenyl, C1-4alkyl or C1-4alkoxy; R3is a hydroxyl functionalized C1-C8alkyl acrylate, methacrylate or C6-C14aryl group, R4is a C1-C10linear or branched alkylene; p is an integer of from 1 to 5 with the proviso that there are no more than thirty carbon atoms in the [—R4O—]p; R5is a C1-C10linear, branched or cyclic alkyl, substituted or unsubstituted C6-C14aryl, or substituted or unsubstituted C7-C15alicyclic hydrocarbon; and m is about 40 to 70, n is about 15 to 35 and o is about 15 to 25.

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patent: 0942331 (1999-09-01), None
patent: 0987600 (2000-03-01), None
patent: 1172695 (2002-01-01), None

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