4. Radiant energy
  5. Ion generation
  6. Field ionization type

Thomas N. Horsky

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Cathode mounting for ion source with indirectly heated cathode

Radiant energy – Ion generation – Electron bombardment type
Patent

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Cluster ion implantation for defect engineering

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Decaborane ion source

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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Decaborane ionizer

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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Decaborane vaporizer

Radiant energy – Ion generation – Field ionization type
Patent

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Profile ID: LFUS-PAI-P-375112

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