4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Thomas Matt

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Coating apparatus for disk-shaped workpieces

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Coating installation for disk-form workpieces

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Heat-treatment system and method

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Profile ID: LFUS-PAI-P-2678794

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