Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-03-28
2006-03-28
Pelham, Joseph (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S388000, C219S400000, C034S216000
Reexamination Certificate
active
07019264
ABSTRACT:
This invention relates to a system and a method for the heat treatment of substrates, incorporating an annular heat-treatment section with a rotary table designed to accept substrate holders, at least two of which substrate holders are positioned one behind the other in heat-treatment zones that extend in a radial spoke pattern around the center of the rotary table.
REFERENCES:
patent: 199 04 045 (1999-02-01), None
patent: 0 399 616 (1990-11-01), None
patent: 2279585 (1995-01-01), None
patent: 63-244429 (1988-10-01), None
Eisenhammer Thomas
Matt Thomas
Stittmatter Gebhard
Zapf Klaus
Pearne & Gordon LLP
Pelham Joseph
Unaxis Balzers Ltd.
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