Coating apparatus for disk-shaped workpieces

Details Coating apparatus for disk-shaped workpieces Coating apparatus for disk-shaped workpieces

2005-01-11

2005-01-11

Versteeg, Steven (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298270, C204S298280, C204S298150, C204S298250, C118S500000

Reexamination Certificate

active

06841048

ABSTRACT:
Coating apparatus for disk-shaped workpieces has a transport chamber with a workpiece transport configuration having two linearly driven transport rams connected to a rotational axis. The rams are within shell lines of a rotation body about the axis and are extended/retracted in the same direction as the axis. A workpiece receiver is at the ends of each ram and two operating openings communicate the transport chamber with stations of the apparatus including a coating station. Surface normals of the openings are in the direction of shell lines. A pump with pump opening communicates with the transport chamber and coating station. At least one of the rams has a closure for closing the pump opening and forming a seal therefor.

REFERENCES:
patent: 5709785 (1998-01-01), LeBlanc et al.
patent: 6416640 (2002-07-01), Schertler

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