4. Electrophotography
  5. Having particular structure
  6. Modular or displaceable

Thomas J. M. Castenmiller

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Object positioning method for a lithographic projection...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Off-axis leveling in lithographic projection apparatus

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Off-axis levelling in lithographic projection apparatus

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Position measuring device, position measuring system,...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Position measuring system for use in lithographic apparatus

Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1565081

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