Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2005-04-05
2005-04-05
Pyo, Kevin (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C250S559290, C250S208100, C356S400000
Reexamination Certificate
active
06875992
ABSTRACT:
A position measuring device includes a radiation source mounted on an isolated reference frame and a two-dimensional radiation detector mounted adjacent the radiation source. The object whose position is to be detected has a mirroring device, e.g. a retro-reflector, mounted on it so as to reflect light emitted from the radiation source along a return path that is parallel to but displaced from the incident light path. The amount of displacement is dependent on the position of the object and is measured by the two-dimensional detector. Three such devices can be combined in a system to measure the position of the object in all six degrees of freedom.
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Ariens Andreas B. G.
Castenmiller Thomas J. M.
Hoeks Martinus H. H.
Kwan Yim-Bun P.
Loopstra Erik R.
ASML Netherlands B.V.
Pillsbury & Winthrop LLP
Pyo Kevin
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