Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2001-02-08
2008-07-08
Bali, Vikkram (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S143000, C382S145000
Reexamination Certificate
active
07397940
ABSTRACT:
A method for placement of a object such as a substrate or a mask on a table, said method including:a first placement step in which the object is placed on a first position on the table;a measuring step in which a displacement between the first position of the object and the required position of the object is determined;a removing step in which the object is released and removed from the table;a moving step in which the object and the table are moved relatively to each other by substantially the said displacement, in a direction substantially parallel to the surface of the table; anda second placement step in which the object is placed at the required position on the table.
REFERENCES:
patent: 4297676 (1981-10-01), Moriya et al.
patent: 4778275 (1988-10-01), van den Brink et al.
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5717482 (1998-02-01), Akutsu et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6420716 (2002-07-01), Cox et al.
patent: 652 487 (1995-05-01), None
patent: 5-166701 (1993-07-01), None
patent: 6-302495 (1994-10-01), None
patent: 10-70177 (1998-03-01), None
European Office Action issued on EP Application No. 01 301 117.6-2222 dated Nov. 17, 2005.
English translation of Japanese Office Action issued in Japanese Patent Application No. 2001-075037 mailed Jan. 24, 2007.
Ariens Andreas B. G.
Castenmiller Thomas J. M.
van de Pasch Engelbertus A. F.
Willems van Dijk Marcus J. H.
ASML Netherlands B.V.
Bali Vikkram
Pillsbury Winthrop Shaw & Pittman LLP
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