4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Theodorus Petrus Maria Cadee

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Lithographic apparatus and apparatus adjustment method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
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Lithographic apparatus and device manufacturing method

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Lithographic projection apparatus and actuator

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2933739

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