Lithographic projection apparatus and actuator

Details Lithographic projection apparatus and actuator Lithographic projection apparatus and actuator

2007-02-20

2007-02-20

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000, C378S034000, C378S035000

Reexamination Certificate

active

11006821

ABSTRACT:
A lithographic projection apparatus is disclosed. The apparatus includes a substrate support constructed to support a substrate, a projection system configured to project a patterned radiation beam onto a target portion of the substrate, and a frame onto which at least a part of the projection system is mounted. A fluid provider is arranged to provide a fluid between the substrate and a downstream end of the projection system. The apparatus also includes an actuator associated with the frame and with the fluid provider and arranged to position the fluid provider, and a cushion system for cushioning vibrational forces when the actuator positions the fluid provider.

REFERENCES:
patent: 6731371 (2004-05-01), Shiraishi
patent: 2002/0018190 (2002-02-01), Nogawa et al.
patent: 2004/0212794 (2004-10-01), Mizuno
patent: 2005/0243293 (2005-11-01), Hara et al.
patent: 2005/0280791 (2005-12-01), Nagasaka et al.
patent: 2006/0033901 (2006-02-01), Hara
patent: 1 477 856 (2004-11-01), None
patent: 1 667 210 (2006-06-01), None
patent: 2002-373849 (2002-12-01), None
patent: WO 2005/093791 (2005-10-01), None
European Search Report issued for European Patent Application No. 05077759.8-2222, dated Aug. 28, 2006.

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