Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-07-18
2006-07-18
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492200, C250S492100
Reexamination Certificate
active
07078715
ABSTRACT:
A lithographic projection apparatus includes a beam production system for projecting a patterned beam of radiation onto a target portion of a substrate, and a support table for supporting an article. The support table has a support surface and an array of protrusions extending from the support surface to support the article on the protrusions. The apparatus also includes a detector for detecting height deviations of the protrusions that affect a surface flatness of the article, a height adjustment device arranged to independently modify a height of the individual protrusions when the support table is operable in the apparatus, and a controller coupled between the detector and the height adjustment device and arranged to control the height adjustment device to adjust the height of the protrusions corresponding to the detected height deviations of the protrusions that affect the surface flatness of the article.
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European Search Report for Appln. No. 03077530.8, dated Jul. 9, 2004.
Cadee Theodorus Petrus Maria
Donders Sjoerd Nicolaas Lambertus
Modderman Theodorus Marinus
Vink Jacob Willem
ASML Netherlands B.V.
Johnston Phillip A.
Wells Nikita
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