4. Metal working
  5. Barrier layer or semiconductor device making

Tetsuya Marubayashi

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Method of manufacturing semiconductor device and substrate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Substrate processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Substrate processing apparatus and maintenance method therefor

Metal working – Barrier layer or semiconductor device making
Patent

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Substrate processing apparatus and maintenance method therefor

Metal working – Barrier layer or semiconductor device making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1585565

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