4. Electric heating
  5. Metal heating
  6. By arc

Tetsunori Kaji

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Apparatus for detecting an end point of etching

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Apparatus for displaying colored image

Facsimile and static presentation processing – Static presentation processing – Attribute control
Patent

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Emission spectroscopic processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Emission spectroscopic processing apparatus and plasma...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Etching end point judging method, etching end point judging...

Semiconductor device manufacturing: process – With measuring or testing
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Profile ID: LFUS-PAI-P-584549

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