4. Radiant energy
  5. Photocells; circuits and apparatus
  6. Photocell controls its own optical systems

Terushige Asakawa

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Process control system

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Process management system

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Projection aligner

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Projection aligner method utilizing monitoring of light quantity

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Projection aligner with a sensor for monitoring light quantity

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Profile ID: LFUS-PAI-P-1224491

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