Projection aligner

Details Projection aligner Projection aligner

1983-08-02

1986-07-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

355 68, G03B 2774, G03B 2780

Patent

active

045981973

ABSTRACT:
A projection aligner wherein light from a light source is passed through a mask so as to focus an image of a pattern of the mask on a wafer, characterized in that at least one sensor for monitoring a luminosity and a distribution thereof is disposed in an optical path between the light source and the mask, whereby a luminosity and a distribution thereof on the wafer can be controlled to proper values. The projection aligner is effective for application to minute processing technologies for the production of semiconductor devices, etc.

REFERENCES:
patent: 3422442 (1969-01-01), Glendinning et al.
patent: 4161363 (1979-07-01), Kahle

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