4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Teruo Someya

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Electron lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Field emission electron gun having automatic current control

Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent

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Method and apparatus for correcting astigmatism in a scanning el

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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X-Ray Lithography apparatus

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-1558232

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