Method and apparatus for correcting astigmatism in a scanning el

Details Method and apparatus for correcting astigmatism in a scanning el Method and apparatus for correcting astigmatism in a scanning el

1978-12-18

1980-07-22

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396ML, G01M 2300

Patent

active

042141630

ABSTRACT:
In a scanning electron microscope, a circle of least confusion of the electron beam is formed on a specimen without operation of a stigmator, then the circle of least confusion is minimized by a stigmator, thereby enabling lens astigmatism in said microscope to be fully corrected.

REFERENCES:
patent: 3597609 (1971-08-01), Anger
patent: 3748467 (1973-07-01), Suganuma

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