4. Adhesive bonding and miscellaneous chemical manufacture
  5. Delaminating processes adapted for specified product
  6. Delaminating in preparation for post processing recycling step

Terumi Muguruma

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Clean storage equipment for substrates and method of storing sub

Fluent material handling – with receiver or receiver coacting mea – Evacuation apparatus
Patent

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Plasma ashing method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Pod and method of cleaning it

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
Reexamination Certificate

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Pod and method of cleaning it

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reexamination Certificate

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Wafer container

Fluid handling – Systems – With pump
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1525770

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