Clean storage equipment for substrates and method of storing sub

Details Clean storage equipment for substrates and method of storing sub Clean storage equipment for substrates and method of storing sub

1998-12-02

2000-09-26

Douglas, Steven O.

Fluent material handling, with receiver or receiver coacting mea

Evacuation apparatus

141 59, 141 98, 414217, B65B 104

Patent

active

061231207

ABSTRACT:
Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers, a unit for fitting the covers to pods, respectively, a unit for holding the pods with the covers, a gas supply unit for individually supplying gas into the pods through the covers, and an exhaust unit for individually discharging an atmosphere from the pods through the covers. Each pod is closed with the cover in the storage equipment, and the gas supply unit and exhaust unit periodically replace an atmosphere in each pod with inert gas or evacuate each pod, to control the storage conditions of each pod in the storage equipment.

REFERENCES:
patent: 5378283 (1995-01-01), Ushikawa
patent: 5806574 (1998-09-01), Yamashita et al.
patent: 5879458 (1999-03-01), Roberson, Jr. et al.

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