Wafer container

Details Wafer container Wafer container

2005-08-09

2005-08-09

Rivell, John (Department: 3753)

Fluid handling

Systems

With pump

C141S098000, C414S217100, C026S026000

Reexamination Certificate

active

06926029

ABSTRACT:
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

REFERENCES:
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5137063 (1992-08-01), Foster et al.
patent: 5217053 (1993-06-01), Foster et al.
patent: 5273423 (1993-12-01), Shiraiwa
patent: 5291923 (1994-03-01), Gallagher et al.
patent: 5295522 (1994-03-01), DeAngelis et al.
patent: 5320218 (1994-06-01), Yamashita et al.
patent: 5378283 (1995-01-01), Ushikawa
patent: 5433574 (1995-07-01), Kawano et al.
patent: 5482161 (1996-01-01), Williams et al.
patent: 5697750 (1997-12-01), Fishkin et al.
patent: 5713711 (1998-02-01), McKenna et al.
patent: 6123120 (2000-09-01), Yotsumoto et al.
patent: 6135168 (2000-10-01), Yang et al.
patent: 6261044 (2001-07-01), Fosnight et al.
patent: 6302927 (2001-10-01), Tanigawa
patent: 7-315477 (1995-12-01), None

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