4. Electricity: motive power systems
  5. Positional servo systems
  6. Program- or pattern-controlled systems

Tel-Varian Limited

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Multi-chamber system provided with carrier units

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Selectable feedback control system

Electricity: motive power systems – Positional servo systems – Program- or pattern-controlled systems
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Semiconductor processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Profile ID: LFUS-PAI-P-703656

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