Multi-chamber system provided with carrier units

Details Multi-chamber system provided with carrier units Multi-chamber system provided with carrier units

1994-03-14

1995-12-12

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414936, 414939, 414940, 414937, 414416, 414754, 4147442, 118719, 901 47, B65G 106

Patent

active

054744105

ABSTRACT:
A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette is mounted. A multi-joined arm for supports the swingable hand, and a base supports the multi-joined swingable arm. The multi-joined arm includes a first shaft member rotatably attached to the hand, a second shaft member rotatably attached to the base, a third shaft member rotated associating with the first shaft member but in a direction reverse to the direction in which the first shaft member is rotated, and a fourth shaft member rotatably attached to the base and to which rotation drive force is transmitted. A first arm is rotatably attached to the first shaft member at the front end thereof and to the second shaft member at the base end thereof. A second arm is arranged substantially parallel to the first arm and fixed to the third shaft member at the front end thereof and to the fourth shaft member at the base end thereof. When the first and second arms are swung, the hand is swung in a direction reverse to the direction in which the first and second arms are swung.

REFERENCES:
patent: 4917556 (1990-04-01), Stark et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4954079 (1990-09-01), Yamaga
patent: 5085553 (1992-02-01), Boowens et al.
patent: 5135608 (1992-08-01), Okutani
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5310410 (1994-05-01), Begin et al.
patent: 5333986 (1994-08-01), Mizukami et al.
patent: 5340261 (1994-08-01), Oosawa et al.
patent: 5374147 (1994-12-01), Hiroki et al.

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