Selectable feedback control system

Details Selectable feedback control system Selectable feedback control system

1993-05-07

1995-09-05

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

31856822, 318590, G05B 1300

Patent

active

054481473

ABSTRACT:
A control system includes a first estimation section for estimating a first state variable of a plant object such as a semiconductor wafer temperature control arrangement on the basis of a control input supplied to the plant object and an output from the plant object, a second estimation section for estimating a second state variable of the plant object on the basis of the control input alone, a switching section for selecting one of the first and second estimation sections, and a servo section for adjusting the control input by feeding back the state variable from the first or second estimation section to an input section of the plant object.

REFERENCES:
patent: 4679136 (1987-07-01), Shigemasa
patent: 4991770 (1991-02-01), Bird et al.
patent: 4998051 (1991-03-01), Ito
patent: 5034312 (1991-07-01), Saito

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