4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

TEL Epion Inc.

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Apparatus and methods for systematic non-uniformity...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Copper interconnect wiring and method of forming thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Formation of doped regions and/or ultra-shallow junctions in...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...
Reexamination Certificate

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Formation of ultra-shallow junctions by gas-cluster ion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Formation of ultra-shallow junctions by gas-cluster ion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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