4. Data processing: measuring, calibrating, or testing
  5. Measurement system in a specific environment
  6. Mechanical measurement system

TECH Semiconductor Singapore Pte Ltd

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Method and system for wafer lot order

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method for passivation of plasma etch defects in DRAM devices

Semiconductor device manufacturing: process – Gettering of substrate
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Method of process trend matching for identification of...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Real time monitoring of particulate contamination in a wafer...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
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