Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate
2007-01-18
2010-10-12
Tsai, Carol S (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
C702S081000, C702S082000, C702S083000, C702S084000, C702S181000, C700S028000, C700S108000, C700S109000, C700S110000, C700S121000
Reexamination Certificate
active
07813893
ABSTRACT:
A method that involves matching the trend of process outcome with the trend of process variables to identify the variables that have an impact on the process outcome is disclosed. The method for process trend matching comprises processing of raw data of process outcome and of process variables using an outlier filtering method, smoothing these data using common smoothing algorithm like Kernel, dividing smoothed raw data equally into time intervals, computing the gradients of the points at both ends of the time intervals, and translating the gradients into a scale based on the magnitude of the gradients. The following steps comprise comparing the process outcome and each process variable independently for same time frame, and assigning a score for both outcome and variable. The sum of the scores is then computed which is used to determine the quality of fit. A real-time monitoring system is then set up to monitor these variables for any drifts. When a drift is detected, troubleshooting activity will be triggered and actions taken to resolve the drift, after which monitoring of the variable will be restarted.
REFERENCES:
patent: 5339257 (1994-08-01), Layden et al.
patent: 5951611 (1999-09-01), La Pierre
patent: 5987398 (1999-11-01), Halverson et al.
patent: 6223091 (2001-04-01), Powell
patent: 6314328 (2001-11-01), Powell
patent: 6445969 (2002-09-01), Kenney et al.
patent: 6577323 (2003-06-01), Jamieson et al.
patent: 6591182 (2003-07-01), Cece et al.
patent: 6690980 (2004-02-01), Powell
patent: 6825050 (2004-11-01), Huang et al.
patent: 6970857 (2005-11-01), Card et al.
patent: 7031878 (2006-04-01), Cuddihy et al.
patent: 2003/0028274 (2003-02-01), Powell
patent: 2003/0198388 (2003-10-01), Wenzel et al.
patent: 2004/0088100 (2004-05-01), Volponi
patent: 2005/0010546 (2005-01-01), Nowotny et al.
patent: 2005/0130329 (2005-06-01), Liao et al.
patent: 2006/0095237 (2006-05-01), Wang et al.
patent: 2008/0177399 (2008-07-01), Fong et al.
Fong Kien Hoong
Fu Wei
Shi Jun
Ackerman Stephen B.
Saile Ackerman LLC
TECH Semiconductor Singapore Pte Ltd
Tsai Carol S
LandOfFree
Method of process trend matching for identification of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of process trend matching for identification of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of process trend matching for identification of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4211635