4. Optics: measuring and testing
  5. Dimension
  6. Thickness

Tatsuo Matsudo

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Capacitive coupling plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Manufacturing method for a field-effect transistor,...

Optics: measuring and testing – Dimension – Thickness
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Method and apparatus for measuring electron density of...

Optics: measuring and testing – With plural diverse test or art
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Method and system for modifying a gate dielectric stack...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Profile ID: LFUS-PAI-P-2787654

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