4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With registration indicia

Takuya Kouno

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Aberration measuring method, aberration measuring system and...

Optics: measuring and testing – Lens or reflective image former testing
Reexamination Certificate

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Aligner evaluation system, aligner evaluation method, a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Aligner evaluation system, aligner evaluation method, a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Alignment apparatus, aberration measuring method and aberration

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Design system of alignment marks for semiconductor manufacture

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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