4. Coating apparatus
  5. Program, cyclic, or time control

Takehiko Fujita

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Film formation method and apparatus for forming silicon...

Coating processes – Electrical product produced
Reexamination Certificate

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Film formation method and apparatus for semiconductor process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Heat-processing method for semiconductor process under a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for using film formation apparatus

Coating apparatus – Program – cyclic – or time control
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Method for using film formation apparatus

Semiconductor device manufacturing: process – Cleaning of reaction chamber
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Profile ID: LFUS-PAI-P-2202744

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