4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Takatoshi Yamashita

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Apparatus and method for generating indium ion beam

Specialized metallurgical processes – compositions for use therei – Processes – Electrothermic processes
Reexamination Certificate

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Apparatus for implanting an ion on a target and method for...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electric field lens and ion implanter having the same

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Electrostatic accelerator and ion implanting apparatus with...

Electric lamp and discharge devices: systems – High energy particle accelerator tube
Reexamination Certificate

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Ion implantation apparatus and method of correcting...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2360789

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