Electric field lens and ion implanter having the same

Details Electric field lens and ion implanter having the same Electric field lens and ion implanter having the same

2007-08-08

2009-10-06

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S3960ML

Reexamination Certificate

active

07598498

ABSTRACT:
An electric field lens includes an entrance electrode, an intermediate electrode, and an exit electrode that are arranged in a traveling direction of ion beams. The intermediate electrode is maintained in a positive potential, and the entrance electrode and the exit electrode are maintained in a ground potential. In addition, the electric field lens includes a first control electrode and a second control electrode that are disposed between the entrance electrode and the intermediate electrode and between the intermediate electrode and the exit electrode, respectively and maintained in a negative potential.

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“Electron and ion beam engineering”, first edition, The Institute of Electrical Engineers of Japan, Mar. 1, 1995, pp. 105-108 (5 pages).

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