Electrostatic accelerator and ion implanting apparatus with...

Details Electrostatic accelerator and ion implanting apparatus with... Electrostatic accelerator and ion implanting apparatus with...

2006-08-29

2006-08-29

Lee, Wilson (Department: 2821)

Electric lamp and discharge devices: systems

High energy particle accelerator tube

C250S492210

Reexamination Certificate

active

07098614

ABSTRACT:
This electrostatic acceleration column has first to fifth electrodes arranged in a traveling direction of ions, which are a kind of charged particles. Then, the second electrode divided into two electrode members, which are opposed to each other across a path of the ions, and to which different electric potentials are applied to deflect the ions. Further, the electrodes arranged on a downstream side from the electrode are arranged along an orbit of ions deflected by the electrode and having specific energy.

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Hideo Kawahara, Japanese Office Action Mailing Date Aug. 31, 2004, and English translation.

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