4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Takaei Sasaki

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Dry-etching method and apparatus, photomasks and method for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Dry-etching method and apparatus, photomasks and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device
Reexamination Certificate

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Dry-etching method and apparatus, photomasks and method for...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and apparatus for dry-etching half-tone phase-shift...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Profile ID: LFUS-PAI-P-2488950

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