4. Coating processes
  5. Coating by vapor, gas, or smoke

Taisuke Yonemura

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Cleaning gas and etching gas

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – Specific organic component
Reexamination Certificate

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Cleaning gases and etching gases

Etching a substrate: processes – Gas phase etching of substrate
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Plasma cleaning gas and plasma cleaning method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Plasma cleaning gas and plasma cleaning method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Processes and equipments for preparing F2-containing gases,...

Coating processes – Coating by vapor – gas – or smoke
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Profile ID: LFUS-PAI-P-2341474

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