Processes and equipments for preparing F2-containing gases,...

Details Processes and equipments for preparing F2-containing gases,... Processes and equipments for preparing F2-containing gases,...

2011-04-05

2011-04-05

Meeks, Timothy H (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

C427S569000, C423S500000

Reexamination Certificate

active

07919141

ABSTRACT:
The present invention provides processes and equipments for safely and easily preparing an F2-containing gas, as well as processes and equipments for surface modification using the F2-containing gas prepared.According to the present invention, a gas containing a fluoro compound that is easier to handle than F2is supplied and the fluoro compound is excited and decomposed to convert it into F2gas before surface modification and then used for surface modification. According to the present invention, there is no necessity of providing, storing and transporting a large amount of F2gas in advance because a necessary amount of F2gas is obtained immediately before surface modification.A process for preparing an F2-containing gas comprises the steps of exciting at least one fluoro compound in a fluoro compound-containing gas by conferring energy on the fluoro compound-containing gas under reduced pressure; and partially or completely converting the excited fluoro compound-containing gas containing the excited fluoro compound into F2under normal pressure or overpressure.

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Supplementary European Search Report issued by European Patent Office in EP 05 72 9764 dated May 4, 2009.

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