4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Tae-Hyuk Ahn

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Method for etching an object using a plasma and an object...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Method for forming a storage node of a capacitor

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for preparing semiconductor including formation of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method of forming a recess channel trench pattern, and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of manufacturing a semiconductor device with a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2603304

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