4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Tadashi Ikejiri

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Ion beam irradiating apparatus and method of adjusting...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion beam measuring method and ion implanting apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and device for irradiating an ion beam, and related...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2677378

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