Ion beam irradiating apparatus and method of adjusting...

Details Ion beam irradiating apparatus and method of adjusting... Ion beam irradiating apparatus and method of adjusting...

2006-12-19

2009-06-02

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492200, C250S397000, C250S398000, C355S030000, C355S055000, C355S067000, C355S068000, C355S069000, C355S070000, C355S071000, C356S034000, C356S400000, C356S401000

Reexamination Certificate

active

07541601

ABSTRACT:
An ion beam irradiating apparatus has: a beam profile monitor14which measures a beam current density distribution in y direction of an ion beam4in the vicinity of a target8;movable shielding plate groups18a,18brespectively having plural movable shielding plates16which are arranged in the y direction so as to be opposed to each other across an ion beam path on an upstream side of the position of the target, the movable shielding plates being mutually independently movable in x direction; shielding-plate driving devices22a,22bwhich reciprocally drive the movable shielding plates16constituting the groups, in the x direction in a mutually independent manner; and a shielding-plate controlling device24which, on the basis of measurement information obtained by the monitor14,controls the shielding-plate driving devices22a,22bto relatively increase an amount of blocking the ion beam4by the opposed movable shielding plates16which correspond to a position where a measured y-direction beam current density is relatively large, thereby uniformity of the beam current density distribution in the y direction.

REFERENCES:
patent: 7030958 (2006-04-01), Luijkx et al.
patent: 6-342639 (1994-12-01), None

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