4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Tadamitsu Kanekiyo

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Dry etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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High-frequency power supply apparatus for plasma generation...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Method and apparatus for plasma processing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Method and apparatus for plasma processing

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1132168

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