4. Radiant energy
  5. Means to align or position an object relative to a source or...

Susumu Ozasa

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Apparatus for electron beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Apparatus for electron beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged particle accelerator using quadrupole electrodes

Electric lamp and discharge devices: systems – Cathode ray tube circuits – Combined cathode ray tube and circuit element structure
Patent

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Electron beam control system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron beam lithography apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-209656

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