4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Test or calibration structure

Susie Xiuru Yang

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Method and apparatus for characterizing features formed on a...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate

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Method and apparatus for characterizing features formed on a...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Methods and apparatus for measuring thickness of etching...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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