4. Thermal measuring and testing
  5. Temperature measurement
  6. By electrical or magnetic heat sensor

Susan B. Felch

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Charge monitor for high potential pulse current dose measurement

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Method of mapping ion implant dose uniformity

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Semiconductor wafer temperature measuring device and method

Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor
Patent

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Profile ID: LFUS-PAI-P-825559

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