4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Sum-Yee Betty Tang

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Etch process for dielectric materials comprising oxidized...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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In-situ integrated oxide etch process particularly useful...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Liquid precursors for the CVD deposition of amorphous carbon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2448169

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