4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Sudha Rathi

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Method and apparatus for reducing copper oxidation and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for reducing fixed charges in a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for depositing an amorphous carbon film with improved...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Nitrogen-free antireflective coating for use with...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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Nitrogen-free dielectric anti-reflective coating and hardmask

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2305912

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