4. Abrading
  5. Machine
  6. Rotary tool

Subramanian Balakumar

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CMP uniformity

Abrading – Machine – Rotary tool
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High K artificial lattices for capacitor applications to use...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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High K artificial lattices for capacitor applications to use...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Linear polishing for improving substrate uniformity

Abrading – Abrading process – Utilizing nonrigid tool
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Method for improving oxide erosion of tungsten CMP operations

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-2073640

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