Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2004-02-24
2010-11-02
Moore, Karla (Department: 1716)
Coating apparatus
Gas or vapor deposition
Work support
C118S724000, C118S725000, C156S345510, C156S345520, C156S345530, C279S128000, C361S234000
Reexamination Certificate
active
07824498
ABSTRACT:
A substrate support has a support structure and a coating on the support structure having a carbon-hydrogen network. The coating has a contact surface having a coefficient of friction of less than about 0.3 and a hardness of at least about 8 GPa. The contact surface of the coating is capable of reducing abrasion and contamination of a substrate that contacts the contact surface. In one version, the support structure has a dielectric covering an electrode. A plurality of mesas on the dielectric have a coating with the contact surface thereon.
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Ahmann Kurt J.
Parkhe Vijay D.
Sansoni Steve
Tsai Matthew C.
Applied Materials Inc.
Janah Ashok K.
Moore Karla
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