4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Stephen Yuen

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Etching a substrate in a process zone

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Gaming machine with multiple payoff modes and award...

Amusement devices: games – Including means for processing electronic data – In a chance application
Reexamination Certificate

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Integrated shallow trench isolation approach

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Integration of silicon etch and chamber cleaning processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Leadwear assembly

Medical and laboratory equipment – Equipment for diagnosis – analysis – or treatment – Electrode – transducer or contact not elsewhere specified
Design Patent

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Profile ID: LFUS-PAI-P-2155044

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