4. Metal working
  5. Method of mechanical manufacture
  6. Electrical device making

Stephen J. Benner

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Apparatus for controlling the forces applied to a...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Chemical mechanical planarization process control utilizing...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Cleaning cup system for chemical mechanical planarization...

Cleaning and liquid contact with solids – Apparatus – With spray or jet supplying and/or applying means
Reexamination Certificate

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Enhanced end effector arm arrangement for CMP pad conditioning

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Method for controlling the forces applied to a...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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Profile ID: LFUS-PAI-P-1570526

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