4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Sriram Anjur

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Composition and method for damascene CMP

Etching a substrate: processes – Mechanically shaping – deforming – or abrading of substrate – Nongaseous phase etching
Reexamination Certificate

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Compositions and methods for CMP of phase change alloys

Compositions – Etching or brightening compositions
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Polishing composition and method utilizing abrasive...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2284060

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