4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. For liquid etchant

Sridharan Srivatsan

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Interlocking chemical mechanical polishing system

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Method and apparatus for detecting planarization of metal...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method and apparatus for heating polishing pad

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Reexamination Certificate

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Method for reducing or eliminating de-lamination of...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2520479

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